Tiago Cunha Dias

Multiscale Plasma-Surface Modelling

Our team studies and models the interactions between low-temperature plasmas and surfaces, ranging from reactor-scale dimensions (cm-m) down to the nanometer scale.

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We seek a holistic understanding of plasma-surface interactions, connecting volume and surface processes from macro to nanoscale.

Our research is closely connected to important societal applications of low-temperature plasmas. In semiconductor manufacturing, we study plasma etching and EUV-induced plasmas, both of which are essential to chip fabrication. In environmental applications, we investigate how plasmas can decontaminate liquids, for example by removing PFAS from water.